Sukkyung Kang

Inyeong Yang

Hyun Jun Ryu

Somin Shin

Geonwoong Kim

Hyunwoong Baek

Seulah Park

Seounghee Yun

Yoon Sick Eom

Dongyeon Won

Dong Geun Kim

Taemin Kim

Filippo Danilo Michelacci

Jihae Chang

Seung Hun Yoo

Seong Jae Kim

Robert Barth

Ji Hyuck Son

Seonghee Yoon

Gabin Ryu

Hyeryeong Kwon

Byeongju Park

Junsoo Park

Suchang Park

Jeongsoo Park

Sein Im

Semin Kim

Yoon Sick Eum

Jisung Kim

Taeho Yoon

Minseung Cho

Hyeongmin Je

Junho Park

Jihyuk Son

Seongjae Kim

Seonghee Seo

Ji-hun Jeong

Jae Young Seok

Hyewon Yang

Gyuhyeon Han

The Advanced Manufacturing and Surface Engineering (AMSE) Laboratory at Korea Advanced Institute of Science and Technology (KAIST), led by Professor Sanha Kim, aims to advance and innovate manufacturing science and technologies via understanding the mechanics of solid-solid contact and engineering the involved surface phenomena, such as adhesion, friction, wear, material transfer and deformation. We also further explore novel materials and processing methods to design and manufacture multi-functional engineered surfaces for multidisciplinary applications, including advanced manufacturing tools, robotics, energy storage devices,
 biosensors, and environmental system.  Our interest further expands to realize autonomous and customized manufacturing via integration of artificial intelligent and machine vision techniques.
저희 AMSELAB@KAIST는 주로 두 개의 공학적 표면들이 물리적 접촉을 할 때 발생하는 접착, 마찰, 마모, 물질의 전달, 변형 등의 현상을 인위적으로 정밀하게 조작함으로써 고부가 가치의 혁신적 제품들을 구현할 수 있는 첨단제조 공정 기술 개발을 목표로 합니다.
현재 연구실에서는 반도체 제조에 핵심적으로 사용되는 화학적 기계연마, 웨이퍼 세정 및 하이브리드 본딩 기술들을 고도화시키는데 주력하고 있으며, 탄소나노튜브 혹은 전기증착된 3차원 나노구조를 활용하여 새로운 기능의 공학적 표면을 구현하고 이를 에너지 저장 장치, 친환경 필터, 광학센서 등 다양한 응용분야에 적용하는 방안을 탐색하고 있습니다. 또한 접촉역학 기반의 이론 모델을 기반으로 자동차 볼트체결 공정의 로봇 자동화를 위한 마찰예측 알고리즘을 개발하고, 여러 개의 소재를 동시에 인쇄하는 다종소재 3D 프린팅 공정장비를 새롭게 구축하며, 머신 비전을 활용하여 제조공정을 실시간으로 모니터링하는 등 제조공정의 유연화, 자동화, 자율화를 위한 첨단화 및 지능화 생산기술 개발을 목표로도 연구를 진행 중입니다.

연구실은 나노 재료 및 가공, 표면 공학, 제조 및 접촉 역학에 중점을 둡니다.

Nondestructive object identification in capillary pick-and-place using surface eddy current induction mediated impedance change

Effects of grain size on bonding performance of Cu-to-Cu bonding

Carbon nanotube sandpaper for atomic-precision surface finishing

Ultrathin 3D-structured Cu/CNT current collector with lithiphilicity gradient for high-performance anode-free Li-metal battery anodes

Direct removal of ultrafine surface contaminants using polymeric brushes with controlled pore sizes

Challenges and innovations in chemical mechanical polishing in the More-than-Moore era

An ionic gelation powder for ultrafast hemostasis and accelerated wound healing

Chemical mechanical polishing of plasma-modified Cu/polymer interfaces for advanced hybrid bonding

Modeling framework and discussion of microstructural effects on the formation of Cu–Cu bonding interfaces in semiconductor stacking

Precision engineering and intelligent technologies for predictable CMP

Origami stacking of micro-fabricated coils for miniatruized eddy current sensors

Material removal rate model in chemical-mechanical polishing using micro-structured pads

Hot-end co-extrusion of multiple thermoplastic filaments for unblended composite additive manufacturing

A mechanics-based predictive model for scratching defects and its application for pad selection in chemical mechanical polishing

Nanoporous capillary gripper for ultragentle micro-object manipulation

Ultrathin 3D Cu/Li composite with enhanced Li utilization for high energy density Li-metal battery anodes

Autonomous process optimization of tabletop CNC milling machine using computer vision and deep learning

Particle-on-demand electrohydrodynamic printing from a reciprocating tip

Preface for autonomous manufacturing with green technology

Mitigation of Cu dishing in chemical mechanical polishing using micro-structured pads

Frequency-comb-referenced Terahertz Fabry-Pérot interferometry for monitoring semiconductor wafer thinning process with a nanometer precision

Characteristics of PVD SiCN for a pplication in h ybrid Cu bonding

Nanometer-resolution white-light scanning interferometry for surface-profiling of hybrid bonding samples for advanced semiconductor packaging

Analysis of torque variation in bolt fastening on coated steel surfaces

A pressure-sensitive, repositionable bioadhesive for instant, atraumatic surgical a p plication on internal organs

Size-dependent fracture in elastomers: e xperiments and continuum modeling

Label-free exosome analysis by surface-enhanced Raman scattering spectroscopy with laser-ablated silver nano particle substrate

Thin, uniform, and highly-packed multifunctional structural carbon-fiber composite battery lamina informed by solid polymer electrolyte cure kinetics

Spatially selective ultraprecision polishing and cleaning by collective behavior of micro spinbots

Ru passivation layer enables Cu-Cu direct b onding at l ow temperatures with o xidation i nhibition

Field-assisted efficient capturing and analysis of airborne nanoparticulate matter using multifunctional nanoporous membrane

Nanotransfer p rinting for synthesis of v ertically a ligned c arbon n anotubes with e nhanced a tomic p enetration

Static friction of magneto-rheological elastomer pads in wall-climbing robots

Nanoribbon yarn with versatile inorganic materials

Programming anisotropic functionality of 3D microdenticles by staggered-overlapped and multi-layered microarchitectures

Engineered vertically-aligned carbon nanotube microarray for self-concentrated SERS detection

An Investigation of Interfacial Strength in Epoxy-based Solid Polymer Electrolytes for Structural Composite Batteries

Accelerated deep-learning-based process monitoring of microfluidic inkjet printing

Low-profile, large-range compression strain sensing using micro-manufactured CNT micropillar arrays

Fabrication of Miniaturized Eddy Current Sensor Embedded in Thin Magneto-rheological Elastomer Film

Switchable capillary adhesion of wet, nanoporous surface structures for micro-object picking-and-placing

리튬 메탈 전지 음극 집전체의 친리튬성 및 전기화학적 성능 향상을 위한 Cu-Zn 동시 전착 합금 상 구조 제어

구리-인듐 합금 기반 친리튬성 음극 집전체 제작 및 무음극 리튬 메탈 전지 성능 평가

Multi-Material 3D Printer Integrating Fused Filament Fabrication and Direct Ink Writing with Conformal System

3D printing of axial flux motor stators using custom-made PA12/Fe composite filaments

3D 프린팅 기술을 활용한 기능성 경사 미세구조 CMP 패드 제작 및 성능 평가

Implementation of a DIW Extruder on a Tool-changeable Motion Platform and Optimization of Printing Parameters

전기증착 공정의 이종합금 결정구조 제어를 통한 리튬금속전지 음극 집전체의 표면개질

나노공학 표면의 비전형적 접촉 역학 및 모세관력을 활용한 첨단 픽앤플레이스 기술

반도체 웨이퍼 폴리싱 공정 모니터링을 위한 테라헤르츠 기반 정밀 웨이퍼 두께 측정

하이브리드 본딩 접합성 향상을 위한 화학기계적연마

패드 표면구조의 균일도 개선을 통한 화학적 기계 연마 공정에서의 디싱 결함 제어

Surface Finishing using Magnetically Actuated Micro Robots

Elastomer Pads for Friction Enhancement in Magnetic Adhering Wall-Climbing Robots

Liquid infiltration into nanoporous membrane for switchable surface adhesion

Effect of Plowing Friction in Bolt Fastening on Coated Steel Plates

Ru Passivation Layer Enables Cu-Cu Direct Bonding at Low Temperatures with Oxidation Inhibition

Modeling and Reduction of Cu Dishing according to Pad Surface Properties in Chemical Mechanical Polishing

Cu/Polymer Hybrid Bonding with Plasma-Assisted Chemical Mechanical Polishing

Nano Sandpaper using Carbon Nanotubes as Coated Abrasives for Ultraprecision Surface Finishing

Cu/Polymer CMP Technology for Heterogeneous Semiconductor Integration

Material extrusion additive manufacturing of axial motor stators using custom-made PA12/Fe composite filaments

Optimization of Additives to Fabricate Fine-Grained Cu via Electroplating for Cu-Cu Direct Bonding

Ultrathin Nanoporous Cu with Lithiophilicity-Lithiophobicity Gradient by MWCNT for Anode-Free Li-Metal Battery Anode Current Collector

Precision Control of Dishing in Chemical Mechanical Polishing Using Surface Structured Pad for Hybrid Bonding

Phase Analysis of Electrodeposited Cu/Zn Bi-material Surfaces and Their Impact on Lifespan as Lithium Metal Battery Anode Current Collectors

Nano Sandpaper for Precise Surface Refinement Using Vertically Aligned Carbon Nanotubes

Material extrusion additive manufacturing of axial motor stators using custom-made PA12/Fe filaments

Soft Microstructured Surfaces with Ultrathin Hard Skin Fabricated by Stereolithography

구리/폴리머 하이브리드 본딩 공정을 위한 고분자 표면의 화학적기계연마

Maximizing Material Removal Efficiency of Micro-Structured Pads in Chemical Mechanical Polishing

Particle Removal Mechanism of Porous Brushes and Downscaling the Pore-Scale for High-Efficiency Cleaning in Post-CMP

Gradient Hardness and CMP Characteristics of Micro-Patterned Pads Fabricated by 3D Printing

Scale Dependence of Particle Removal Efficiency in PVA Brush Scrubbing

Static Friction of Magneto-Rheological Elastomer Pads in Wall-Climbing Robots

Ultrathin Nanofibrillar Cu Sheet Covered with Directly Grown Lithiophobic CNTs for Anode free Li metal Battery Anode Current Collectors

다종금속 전착을 활용한 무음극 리튬금속전지 집전체의 표면개질

음극 집전체 친리튬 기능성 향상을 위한 이종금속 전착 및 특성 분석

Development of Methodology for Predicting Friction Coefficient in Bolt and Coated/Uncoated Steel Plate Fastening

수직이동로봇의 표면접착력 향상을 위한 자기유변탄성체 패드 최적 제작 방안

Polishing Characteristics of Vat Photopolymerization Additive Manufactured CMP

Particle Removal Efficiency according to Pore Structures in PVA Brush Scrubbing

Material Removal Rate in Chemical Mechanical Polishing according to Pad Surface Micro-Patterns

정밀가공된 CMP 패드의 미세돌기 형상에 따른 재료제거율

Material extrusion additive manufacturing of axial motor stators using Fe particle embedded filaments

Hot embossing of electrospun nanofiber network for nanoporous flexography stamp

Fabrication of High-Precision and Mid-Aspect Ratio Micro Cylindrical and Hemispherical Array Structures Utilizing Lithography Technology and Application of Chemical-Mechanical Polishing Process

Droplet morphology monitoring in inkjet printing using deep learning algorithm

Probability of impurity scratching according to pad surface properties in chemical-mechanical polishing

Vat Photopolymerization Additive Manufacturing of CMP Pads with Precisely Controlled Surface Structures and their Polishing Characteristics

CMP Technology for Cu/Polymer in 3D Stacked Semiconductor Fabrication

Effect of Process Parameters on Material Removal in Chemical-Mechanical Polishing with Surface Structured Pads

Fabrication of Optimized Micro-Patterned Pad for High-Precision Chemical-Mechanical Polishing Process

Synthesis of porous PVA brush using NaCl sacrificial particles and characterization of its cleaning efficiency

Low-temperature polycrystalline Ge growth on PtSe2 for BEOL compatible devices

CMP Technology for Cu/Polymer Hybrid Bonding

Material extrusion 3D printing of motor components using filaments with different magnetic compositions

Performance Analysis of Magnetorheological Elastomer Pads according to Material Characteristics

Integration of Nanophotonic Structures with a Metallic Nanoporous Air Filter for Particulate Matter Monitoring

Additive Material Transfer Using On-Demand Adhesion Modulation in a Self-assembled Nanofluidic Structure

염화나트륨 입자를 희생 입자로 활용한 다공성 세정 브러쉬 제작 방법

3D 프린터 지지패드 및 이를 구비한 3D 프린팅 시스템

Three-dimensional electromechanical adhesive surface structure capable of adhesive force manipulation and tactile sensing, design and manufacturing method thereof using 3d printing

연마 패드, 연마가공장치 및 연마 패드 제조방법

수직으로 정렬된 탄소 나노 튜브를 이용한 고정-연마재 패드 및 이의 제조 방법

연마 가공방법 및 연마 가공장치

금속 공기필터

Structurally Tailored Hierarchical Current Collector Surface for Lithium-Metal Battery

리튬 금속 전지용 음극, 이의 제조 방법 및 이를 포함하는 리튬 금속 전지

무음극 리튬금속전지를 위한 구리/CNT 복합구조를 갖는 초박형 3차원 음극 집전체

개인맞춤형 안정 장비 및 의료 기기의 3D 프린팅

형상 기억 능력을 가지는 동축 3D 프린팅 고분자 구조체

반도체 회로 제조 방법

리튬 이차전지용 음극 및 이를 포함하는 리튬 금속 이차전지

연마패드용 서브패드, 이를 포함하는 연마패드, 및 상기 연마패드용 서브패드의 제조방법

점진적 경도를 갖는 화학적 기계적 연마 패드의 광중합 적층 제조 및 연마 특성제어가 가능한 자외선 조사 기법

나노 섬유 세정 브러시 및 그 제작 방법

차량용 공기정화 덕트조립체

다종소재 동축 출력 3D 프린터를 이용한 인공 근육 제작 방법

동축 섬유 압출 노즐 및 이를 이용한 다종소재 3D 프린터

액적-메쉬 충돌 기반 금속 프린팅 기술

전자접착기술 기반 접착력 능동제어 표면을 포함하는 소재압출 방식 3D 프린팅 장비 자동화 시스템

저점착성 나노다공성 박막 내 모세관력을 이용한 마이크로 조립 디바이스 및 이의 제작 방법

Polishing pad, chemical mechanical polishing apparatus including the smae, and methode for manufacturing semiconductor device using the same

소프트 로봇핸드

Membrane for air filter, manufacturing method of the same, air filter including the same

수직정렬된 탄소나노튜브 기반 나노섬유 세정브러쉬

연마패드, 그를 포함하는 화학적 기계적 연마 장치, 및 그를 이용하는 반도체 소자의 제조 방법

Fixed-abrasive Polishing Pad and Fabrication Method using Vertically Aligned Carbon Nanotubes

탄소나노튜브로 결속된 고내마모성 박막 코팅을 포함하는 복합 연마패드 및 이의 제조방법

탄소나노튜브들을 포함하는 복합연마패드 및 이의 제조방법

Composite polishing pad comprising a thin film with high wear resistance stitched with carbon nanotubes and method for manufacturing the same

Composite polishing pad including carbon nanotubes and method for manufacturing the same

이차전지용 음극 및 이의 제조방법

수직 정렬된 탄소나노튜브를 이용한 고정-연마재 패드 제작 및 응용방법

방호복 항균 능동통기 장치

금속 공기필터 제조 방법

Design and Manufacturing of 3D electromechanical Surfaces using 3D Printing for Tunable Adhesion and Tactile Sensing

Apparatus and Methods for Contact-Printing using Electrostatic Nanoporous Stamps

Nanocomposite Surfaces with Electrically Switchable Adhesion

모양 및 배치의 변화에 따른 3차원 전자기계적 접착 표면 특성 제어

Three-Dimensional Electromechanical Adhesive Devices and Related Systems and Methods

Systems and Methods for Electromechanical Transfer Printing

Nanoporous Stamp Printing of Nanoparticulate Inks

Nanoporous Stamp for Flexographic Printing

Ultrathin high-resolution flexographic printing using nanoporous stamps

On-demand orbital maneuver of multiple soft robots via hierarchical magnetomotility

Additive manufacturing of biomechanically tailored meshes for compliant wearable and implantable devices

Shape-programmed fabrication and actuation of magnetically active micropost arrays

Stable wettability control of nanoporous microstructures by iCVD coating of carbon nanotubes

Hybrid micromachining using a nanosecond pulsed laser and micro EDM

The role of pad topography in chemical-mechanical polishing

Synthetic Butterfly Scale Surfaces with Compliance‐Tailored Anisotropic Drop Adhesion

Explaining evaporation-triggered wetting transition using local force balance model and contact line-fraction

Soft nanocomposite electroadhesives for digital micro-and nanotransfer printing

The effect of pad-asperity curvature on material removal rate in chemical-mechanical polishing

Modeling and mitigation of pad scratching in chemical–mechanical polishing

Structurally tailored hierarchical Cu current collector with selective inward growth of lithium for high‐performance lithium metal batteries

Advanced Cu/polymer hybrid bonding system for fine‐pitch 3D stacking devices

Sanha Kim

Associate Professor

AMSE Lab @ KAIST

교수님 소개

김산하

연구실 소개

연구실 키워드

알럼나이가 간 회사

연구실 지원 방법

대우 조건

연도별 논문 인용수

저널 & 학회 논문 출판 수

연구실 논문 목록

Direct removal of ultrafine surface contaminants using polymeric brushes with controlled pore sizes

Challenges and innovations in chemical mechanical polishing in the More-than-Moore era

An ionic gelation powder for ultrafast hemostasis and accelerated wound healing

연구실 보유 특허

대학별 입시끈

우리 연구실 모집

교수님 소개

김산하

연구실 키워드

알럼나이가 간 회사

연구실 지원 방법

대우 조건

연도별 논문 인용수

저널 & 학회 논문 출판 수

연구실 논문 목록

Direct removal of ultrafine surface contaminants using polymeric brushes with controlled pore sizes

Challenges and innovations in chemical mechanical polishing in the More-than-Moore era

An ionic gelation powder for ultrafast hemostasis and accelerated wound healing

연구실 보유 특허

최근 3년간 연구실적 높은 연구실

대학별 입시끈

우리 연구실 모집